| Natural of Defect |
Effective area |
| Inclusion/Bubble/Pit |
40µmMax |
| Dust |
Can be blew away is acceptable |
| Scratch |
20µm Max.In width;
Invisible after rotated |
| Edge Chips |
Max.0.3mm |
| Memark |
Inspection environment: With class1000 clean room/class100clean booth and 60W bull lamp and around 15cm to objective with normal net eyes. |